Abstract:In laser processing, adjusting the angle or the off-axis displacement of the auxiliary gas relative to the laser beam axis is an important method to improve cutting speed and quality. However, conventional electromechanical actuators find it difficult to achieve high-speed, high-precision actuation in a compact structure with multiple degrees of freedom. This paper presents a five-degree-of-freedom (5-DOF) electromagnetic levitation actuator system based on six sets of differential electromagnets and its backstepping control method. Based on the dynamic modeling of this system, the backstepping controller is designed by constructing the Lyapunov function of the error. The dynamic responses of the z, α, and x degrees of freedom and the effects of the backstepping controller parameters on the performance of the 5-DOF electromagnetic levitation actuator under both PID control and backstepping control are compared through numerical simulations and experimental validation. The results show that the backstepping control method is superior to PID control, and the dynamic performance of the system improves by appropriately increasing the gain coefficients (kz, kα, kx) of the backstepping controller.